The vacuum pump shall be able to discharge all steam volume caused by the whole process of vacuum technology processing process under its pressure. Properly constitute the vacuum pump. Because the vacuum pump has optional vacuum pumping, even if a certain pump is selected, the vacuum pumping regulations cannot be considered. Multiple pumps must be formed to fill each other to consider the vacuum pumping regulations. For example, the titanium lift pump has a high pump efficiency for hydrogen, but can not pump helium, while the three pole magnetron sputtering ion pump (or the two pole asymmetric encrypted negative magnetron sputtering ion pump) has a certain pump efficiency for argon. If the two are combined, the vacuum pump equipment will obtain a good vacuum value. Vacuum pump When the vacuum pump cannot work under atmospheric pressure, the vacuum pump must be prepared for treatment. The inlet and outlet working pressure of the vacuum pump is less than atmospheric pressure, so the front pump must be used, so it must form an application pump. Provisions of vacuum technology on oil environmental pollution. If the machinery and equipment are strictly managed without oil stains, various gasoline free pumps should be selected, such as water ring pump, carbon molecular sieve suction pump, magnetron sputtering ion pump, cryogenic pump, etc. If the regulations are not strict, you can choose an oil vacuum pump, plus some anti oil environmental pollution countermeasures, or cold trap, baffle, oil trap, etc., you can also clean up the regulations of the vacuum pump. The vacuum pump shall be installed in a solid place on the ground, with sufficient indoor space nearby, which is conducive to inspection, maintenance and repair. The subgrade engineering level shall be maintained under the vacuum pump base. It is recommended to pad damping rubber or cast and install with anchor screws at the four corners of the base to ensure that the vacuum pump operates stably and has little vibration. The connecting pipeline between the vacuum pump and the system software shall have reliable sealing performance. For small vacuum pumps, metal hose can be used, and acid and alkali resistant vulcanized rubber can be used as the connecting gasket. For small vacuum pumps, vacuum pump rubber hose can be used for connection. The pipeline shall not be lower than the breathing specification of the vacuum pump, and the specified pipeline shall be short and less bends. (when welding steel pipe, the welding slag in the pipeline shall be eliminated, and it is forbidden to penetrate into the vacuum pump chamber.)
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